1. Project Background

Wet stripping equipment is a critical tool used in semiconductor and precision manufacturing processes. Its primary function is to remove thin films or coated layers from substrates through controlled chemical solutions and temperature management. These systems are widely applied in microelectronics, optical components, flexible displays, and other high-precision industries, where process consistency and stability are essential.

A typical wet stripping system includes a chemical circulation module, precise temperature-control system, solution delivery system, and a programmable automation platform. Because stripping quality is highly sensitive to process parameters, the equipment must maintain strict control over liquid levels, temperature, flow rate, and chemical stability to ensure uniform stripping results while reducing substrate damage.

This project focuses on delivering a stable, accurate, and high-efficiency automation solution for a semiconductor wet stripping production line, improving throughput and product quality.

2. Solution Overview

• Main Controller: Keyence PLC

• Applicable Process: Front-end lithography—pre-patterning wet process

• I/O Configuration: Approx. 100 digital I/O points

• Annual Deployment Volume: 80 units

3. Technical Implementation

The wet stripping equipment adopts a Keyence PLC combined with RS-series I/O modules, forming a complete and reliable automation control system designed for precise process execution.

1. Multi-sensor Input Acquisition

The I/O module collects essential process signals from various sensors, including:

• Liquid level sensors

• Temperature sensors

• Flow sensors

• Chemical circulation status sensors

These signals ensure accurate monitoring of chemical supply, temperature consistency, and process stability throughout the stripping cycle.

2. Precise Actuator Control

Through high-speed logical processing, the PLC controls the I/O modules and executes coordinated actions such as:

• Chemical heating adjustments

• Precise solution dispensing

• Cleaning and circulation switching

• Valve control

• Safety protection and interlocking

This ensures that the entire stripping sequence runs smoothly, efficiently, and safely.

3. Improved Process Consistency

Automation minimizes human error and enhances data traceability. The unified control logic ensures repeatable stripping performance, ultimately improving yield across the semiconductor process.

4. Solution Advantages

Compact and Lightweight Design

The modular structure allows seamless integration into large-scale wet processing lines, reducing installation space and enhancing flexibility.

Easy Installation and Maintenance

Plug-and-play I/O architecture reduces wiring complexity, while the PLC supports fast troubleshooting and diagnostics—minimizing system downtime.

5. Result & Value Delivered

By implementing the Keyence PLC + RS I/O automation architecture, the wet stripping system achieved:

• Higher stripping consistency that meets semiconductor-level precision requirements

• Improved automation and reduced operator intervention

• Increased production efficiency and yield

• Strong scalability for future process upgrades

This solution has been successfully deployed in front-end lithography pre-processing lines and has received highly positive feedback from customers.